Rapid Thermal Processing of Semiconductors (Microdevices) |  | Authors: Victor E. Borisenko, Peter J. Hesketh
Publisher: Springer
Category: Book
List Price: $269.00
Buy New: $199.73
as of 2/22/2012 12:19 PST details
You Save: $69.27 (26%)
New (12) Used (6) from $124.95
Seller: jasper11
Languages: English (Unknown), English (Original Language), English (Published)
Media: Hardcover
Edition: 1
Pages: 380
Number Of Items: 1
Shipping Weight (lbs): 1.9
Dimensions (in): 9.9 x 6.4 x 1
ISBN: 0306450542
EAN: 9780306450549
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Product Description
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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