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Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)

Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)Author: Alfred Kwok-Kit Wong
Publisher: SPIE Publications
Category: Book


Languages: English (Unknown), English (Original Language), English (Published)
Media: Paperback
Pages: 234
Number Of Items: 1
Shipping Weight (lbs): 1.1
Dimensions (in): 10 x 7.1 x 0.6

ISBN: 0819439959
EAN: 9780819439956

 
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